Fused Quartz Boat for Wafer Carrier

Quartz boats play a crucial role in the semiconductor industry, serving as carriers for delicate silicon wafers during various processing steps. These boats are made of high-purity fused quartz, ensuring the safe transport and handling of the wafers without any risk of contamination.

One of the key features of quartz boats is their exceptional purity. The fused quartz material used in their production is renowned for its high level of purity, which is essential for applications in the semiconductor industry where even the slightest impurity can have detrimental effects on the end product. The high purity of quartz boats ensures that the wafers remain free from any contaminants, allowing for the precise and accurate processing of semiconductor materials.

In addition to their purity, quartz boats are also known for their durability and reliability. The fused quartz material used in their construction is highly resistant to thermal shock and chemical corrosion, making them ideal for use in high-temperature processes such as annealing and sputtering. This durability ensures that the quartz boats can withstand the harsh conditions of semiconductor manufacturing without compromising the integrity of the wafers they carry.

Furthermore, quartz boats are designed with precision and care to ensure the safe transport and storage of silicon wafers. The boats feature a sleek and streamlined design that minimizes any potential damage to the wafers during loading and unloading. The smooth and even surface of the quartz boats prevents scratching or marring of the wafers, maintaining their pristine condition throughout the manufacturing process.

Another important feature of quartz boats is their wafer carrier capability. The boats are specifically designed to securely hold and transport silicon wafers of various sizes, ranging from 1-inch to 12-inch diameters. The wafer carrier design ensures that the wafers are properly aligned and positioned within the boat, preventing any misalignment or damage during processing.

Overall, quartz boats are an essential component in the semiconductor industry, providing a reliable and efficient means of transporting and handling silicon wafers. With their high purity, wafer carrier capability, and durable fused quartz construction, these boats are an indispensable tool for semiconductor manufacturers looking to achieve high-quality and precise processing of their materials.

Quartz boat, quartz trough boat, quartz boat, quartz ark performance introduction

1.High Temperature Resistance. The softening point temperature of quartz glass is about 1730℃, which can be used for a long time at 1100℃, and the temperature of short time use can reach 1450℃.
2.Good CorrosionResistance. Quartz glass almost does not react with other acids, and its acid resistance is 30 times that of ceramics and 150 times that of stainless steel, especially at high temperatures .Stability is the best of any other engineering material.
3. Good Thermal Stability. The thermal expansion coefficient of quartz glass is very small, can withstand drastic temperature changes, the quartz glass is heated to about 1100 ° C, and will not burst into normal temperature water.
4.Good Light Transmission Performance. Quartz glass has good light transmission performance in the entire spectral band from ultraviolet to infrared, and the visible light transmission rate is more than 93%, especially in the ultraviolet spectral region .The excess rate can reach more than 80.
5. Good Electrical Insulation Performance . The resistance value of quartz glass is equivalent to 10,000 times that of ordinary glass, and the electrical insulating material has good electrical properties even at high temperatures.

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